WHM

WHM

WHM

Wafer Handling Module

 

Handling solution with integrated WHR-VAC high load wafer handling robot for handling substrate carriers in high vacuum environment.

The number of process ports are customized starting from 4 pcs. up to more then 8 pcs. of process stations.

 

 WHM-VAC Wafer Handling Module

 Handling Module consist of a main vacuum chamber with integrated Wafer Handling Robot WHR-VAC.

 Adenso_Wafer_Handling_Robot
Video

 WHM-VAC - 4 PS

 Handling module with up to 4 pcs. of process stations.

 WHM-VAC - 6 PS

 Handling module with up to 6 pcs. of process stations.

 WHM-VAC - 8 PS

 Handling module with up to 8 pcs. of process stations.


 

 DTS 200 / 300 / 450 - Device Test System

 Suitable for 200 / 300 / 450mm wafer in combination with all kind
 of test application in inert gas invironment (glovebox),
 e.g. SURAGUS non-contact inline measurement solution
 for sheet resistance [Ohm/sq] and matal layer thickness [nm, µm].

 DTS_Device_Test_System

 DTS special / glovebox

 Applications with special substrates like glass plates.
 Customized CASSETTE lift available.
 Glovebox integration as a standard.

 DTS_Device_Test_System

 WHM-VAC - YOUR PROJECT

 Your process ideas...

 

 

 

     
Subsrates   Wafer up to 450mm
     
Materials   Silicon, Ceramic, Glasses, ...
     
     

Your Business:

Research and Production:

  • materials research
  • layer development
  • semiconductor
  • sensors
  • optics