LLM

LLM

LLM

Load Lock Modules

 

Based on extended experience in automation and vacuum technology and driven by the customers request for higher quality and productivity as well as lower productions costs the Adenso team permanently develops new products and solutions:

 

 LLM - Load Lock Module  -  Automatic Version

 Customized substrate stocker system for high vacuum environment.
 Capacity starts at 5 substrate carriers and goes up to more than 20 pcs.
 The weight of substrate carrier could be up to 10 kg each!

Adenso_Wafer_Handling_Robot Video

 LLM - Load Lock Module  -  Manual Version

 Customized load lock system for manual load / unload of substrate carriers.
 The weight of substrate carrier could be up to 10 kg each!

 LMS - Load Lock - Mapping System

 Sensor based system which allow to scan the loaded carrier cassettes.

 SCC - Substrate Carrier Cassette

 Customized substrate carriers for using with the WHR-VAC wafer handling robot. 

 SCS - Substrate Carrire Cassette - in-situ

 Substrate carriers with integrated measurement equipment.

 

 SCS - Substrate Carrire Cassette - ACTIVE

 Substrate carriers with integrated heating equipment.