WHR

WHR

WHR

Wafer Handling Robot

 

Wafer Handling Robot for highest load and large travel ranges.


Caused by a simple arm geometry this robot has an compact turning area and allow to use gate valves with small openings which safes a lot of costs for the central handling module.

Optimized for handling tasks of sensitive and large substrates like glass substrates, FPD Flat Panel Display, ...
### GLOVE BOX VERSION AVAILABLE ###
### FULL STAINLESS STEEL VERSION AVAILABLE ###

 

 
 WHR - BASE TYPES

                                    WHR_ULTRA  

 WHR - LARGE

 Suitable for all kind of applications in vacuum environment and
 glovebox systems with high requirements to travel range and load.

   

 WHR - EXTRA LARGE

 Applications with increased requirements to travel range.

 Example:  TRIAX-Module at SCOUT 300triax from Ortner Dresden.

.

 WHR - ULTRA LARGE

 Largest travel ranges up to threefold to known solutions.

 Example: 
 DTS Device Test System for wafer 100/200/300/450mm,
 suitable for high vacuum enviroment as well as glovebox systems.

 

Available customized types:

 

 WHR-VAC Wafer Handling Robot    -    VACUUM

 Wafer Handling Robot optimized for highest load + prcesicion in vacuum enviroments.

 Substrates: wafer, carrier, glass-substrates, FPD Flat Panel Display, PCB, ....

Adenso_Wafer_Handling_Robot Video

 WHR Wafer Handling Robot     -     ATMOSPHERE

 Wafer Handling Robot optimized for highest load + prcesicion in atomosphere
 and enclosed enviroments like glove boxes.

 Substrates: wafer, carrier, glass-substrates, FPD Flat Panel Display, PCB, ....

   

 WHR-VAC - SPECIAL

 - full stainless steel version (vacuum side)
 - extra large X-movement range (SE - STROKE EXTENSION)
 - ultra high load

 Customized versions of the handling robot.

Adenso_Wafer_Handling_Robot Video

 WHR-VAC - ULTRA HIGH LOAD VERSION

 Special version of the handling robot for active carrier systems up to 250kg.

 WHR-VAC - BASIC MODULE

 Base module for integration as OEM-procudt into your equipment.

 WHR-VAC - X-AXIS

 Customized designed X-axis (inside vacuum enviroment).
 Travel range fittet to the current handling task.
 Full stainless steel version available.
 Adaption for EE end effectors.

 

 WHR-EE - ENDEFFECTOR

 End effectors according to the used substrate carriers.
 All geometries. All materials.

 

 

     
Subsrates   Wafer up to 450mm
     
Materials   Silicon, Ceramic, Glases, ...
     
     

Your Business:

Research and Production:

  • materials research
  • layer development
  • semiconductor
  • sensors
  • optics